UTILITY 工程
UTG Slimming Business
UTILITY BASIC DESIGN CONCEPT
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洁净室 UTILITY(UHP SYSTEM)的特点
- 在半导体工艺上与产品直接或间接接触
- 影响生产收益率
- UHP (Ultra High Purity) SYSTEM : Gases, Chemical, UPW
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UTILITY CONSUMPTION
- BASIC设计的基本DATA
- 同时反映使用率、安全率
DELIVERY SYSTEM
UHP PIPING INSTALLATION
一次都没有正确施工的Clean Room及UHP System在修改上存在很多限制,
内在会存在持续反复的痼疾。
施工案例

Cda /N2 piping

Gas/Exhaust piping

CDA System Install-1

H-, P-Vac & PCW

House Vac System

Process Vac System

PCW Tank

PCW System

CCSS System

H-Vacuum Adapter Hole-1

PCW Piping

PCW & DI Piping

Gas cabinet Install

Gas Cabinet Piping

Gas Cabinet & GMP Piping

Gas Duct Piping

GMB Box

GMB Piping

GMB Install for P-5000 System

DI Water System

UPW-CVD Line

UPW-PVD Line

Pipes (PVD Pump Position)

Pipe Line Taps
顾客咨询
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CLEAN ROOM 工程

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朱卫兵/部长
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UTILITY 工程

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朴顺钟/总监
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PFA 材料

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钱丽娟/部长